RIYANTO, Edy; MARTIDES, Erie; JUNIANTO, Endro; PRAWARA, Budi. The Growth Mechanisms of Atomic Layer Deposition: An Overview. Eksergi, [S. l.], v. 17, n. 2, p. 56–61, 2020. DOI: 10.31315/e.v17i2.3714. Disponível em: https://jurnal.upnyk.ac.id/index.php/eksergi/article/view/3714. Acesso em: 15 jul. 2025.