Riyanto, Edy, Erie Martides, Endro Junianto, and Budi Prawara. “The Growth Mechanisms of Atomic Layer Deposition: An Overview”. Eksergi 17, no. 2 (December 11, 2020): 56–61. Accessed July 12, 2025. https://jurnal.upnyk.ac.id/index.php/eksergi/article/view/3714.